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本文利用蒙特卡洛方法对Ｙ１Ｂα２Ｃｕ３Ｏ７－δ超导薄膜制备过程中， Ｙ、Ｂａ、Ｃｕ的溅射和沉积过程进行了模拟，得到了按各种角分布溅出的Ｙ、Ｂａ、Ｃｕ三种原子的沉积粒子数随Ｒ，ｚ的变化规律，并通过计算结果与实验结果的比较初步确定了Ｙ、Ｂａ、Ｃｕ三种原子在被溅出时的角分布。
In this paper, the sputtering and deposition processes of Y, Ba and Cu during the preparation of Y1Bα2Cu3O7-δ superconducting thin films were simulated by Monte Carlo method. The Y, Ba and Cu atoms spattered at various angular distributions were obtained. The variation of deposition number with R and z was also determined. The angular distribution of Y, Ba and Cu atoms when they were sputtered was determined by comparison between the calculated and experimental results.