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This paper deals with the kinetics of compound layer growth of steel En40B plasmas nitrided at 520℃ for different time and establishes the corresponding mathematical model based on the thermodynamics and kinetics of nitrogen diffusion process. The results show that the compound layer consists of dual phases ε (Fe2-3N) and γ (Fe4N) and its thickness increases with increasing nitriding time. The calculated data indicate that the critical concentration between compound layer and diffusion one is about 0.82wt%. The computer simulation results demonstrate that predicted compound layer thickness agrees with the measured data.