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利用电子背散射衍射、扫描电镜和X射线衍射技术研究了CVD自支撑金刚石薄膜的孪晶组织形貌、孪晶界和晶体取向差分布。研究表明,金刚石薄膜中存在一阶和二阶孪晶,不同的孪晶取向转变过程能形成不同的孪晶组织形貌,高频率的孪晶能对薄膜织构产生明显影响。
The twinstructure, twin boundary and crystal orientation difference of CVD self-supporting diamond films were investigated by electron backscatter diffraction, scanning electron microscopy and X-ray diffraction. The results show that there are first and second order twins in the diamond film. Different twin orientation changes can form different twins’ morphology. High frequency twins can significantly affect the texture of the film.