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本文研究了Ti离子注入对ZnO纳米棒阵列结构、形貌、光学特性和疏水性的影响。XRD测试表明注入前后ZnO纳米棒均为六方纤锌矿晶体结构。然而,随着对ZnO纳米棒阵列注入剂量的增加,样品沿(002)晶面优先生长的趋势降低,而且当注入剂量达到5×1017/cm2时,甚至出现ZnTiO3(104)晶面衍射峰,说明了这种物质的存在,而后面的XPS表征也进一步证明了Ti-Zn-O化学键的存在。样品形貌测试表明,离子注入后由于受刻蚀和溅射的作用,不仅使得ZnO纳米棒表面形貌发生了很大的变化,透光率也显著下降。离子注入后ZnO纳米棒表面疏水性受形貌变化的影响也发生了改变,使得其疏水性增强,当Ti离子注入量为1×1017/cm2时ZnO纳米棒表面接触角达到了151.4°。总之,离子注入作为一种较新颖的表明改性方法,通过对ZnO纳米棒阵列改性处理可以明显扩展其潜在应用价值。
In this paper, the effects of Ti ion implantation on the structure, morphology, optical properties and hydrophobicity of ZnO nanorod arrays were investigated. The XRD results showed that the ZnO nanorods were hexagonal wurtzite crystal structure before and after implantation. However, with increasing dose of ZnO nanorod arrays, the preferential growth of the sample along the (002) plane decreased, and even when the implantation dose reached 5 × 10 17 / cm 2, the diffraction peak of ZnTiO3 (104) Illustrates the existence of this material, and the subsequent XPS characterization further proves the existence of Ti-Zn-O chemical bonds. The morphology of the samples shows that the surface morphology of the ZnO nanorods not only changes greatly but also the transmittance of the ZnO nanorods decreases significantly due to the etching and sputtering after the ion implantation. The surface hydrophobicity of ZnO nanorods after ion implantation is also affected by the change of morphology, which makes the hydrophobicity of ZnO nanorods increase. The contact angle of ZnO nanorods reaches 151.4 ° when the ion implantation dose is 1 × 10 17 / cm 2. In short, ion implantation as a more novel method of modification, ZnO nanorod array modification can significantly expand its potential application value.