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本文报道了制作在(001)硅长方膜中心区域的二组共十种几何设计的横向电压型压力传感器的灵敏度测试分析结果.得到了电源电极短路效应和输出电极短路效应引起的灵敏度几何因子与器件尺寸的关系.实验结果与数值分析所得的结果相当符合.这些结果为横向电压型压力传感器几何图形的设计提供了有用的准则.
In this paper, we report the results of sensitivity analysis of two types of transverse voltage type pressure sensors with two geometries designed in the center of (001) silicon rectangular film, and obtain the sensitivity geometric factor caused by the short circuit effect of the power electrode and the short circuit effect of the output electrode And the size of the device.The experimental results are in good agreement with those obtained by numerical analysis.These results provide useful guidelines for the design of transverse pressure type pressure sensor geometry.