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从叠加偏载的运动方程出发,借助微扰理论推导了压电晶片上声表面波波速的温度、应力敏感模型,提出了应力敏感系数的概念。分析了硅酸镓镧晶体在双旋转平面内的温度和应力敏感特性,并以等高线的形式给出了理论计算结果。结合机电耦合系数及束偏向等其它特性,提出了一些具有潜在应用价值的优化切向。对欧拉角为(0,150°,22°)切向基片的温度和应力敏感特性进行了实验研究。通过对石英和硅酸镓镧两种晶体的理论计算和实验比较,验证了本文理论方法和计算结果的正确性。
Based on the equations of motion of superimposed eccentric partial load, the temperature and stress sensitivity models of surface acoustic wave velocity on piezoelectric wafer were derived by means of perturbation theory, and the concept of stress sensitivity coefficient was proposed. The temperature and stress sensitive properties of the gallium lanthanum silicate crystal in the double rotation plane are analyzed. The theoretical calculation results are given in the form of contour lines. Combined with other characteristics of electromechanical coupling coefficient and beam bias, some optimized tangential values have been proposed. The temperature and stress sensitive characteristics of Euler angles (0,150 °, 22 °) tangential substrate were experimentally studied. The theoretical calculation and experimental comparison of two kinds of crystals, quartz and Gallium lanthanum silicate, verify the correctness of the theoretical method and calculation results.