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以玻璃为基片的微流控芯片在制备方面存在制作成本偏高及加工周期较长等问题.本研究以廉价的载玻片为微流控芯片基片材料,以铬膜为牺牲层,通过优化光刻和湿法刻蚀工艺,得出较为优异的湿法刻蚀条件,制备出了较佳结构的玻璃微沟道.将其与PDMS进行不可逆封接后,获得了玻璃-PDMS芯片.该工艺简单,且有效地降低了芯片的制作成本.电渗性能测试结果表明,该芯片电渗性能稳定、良好.
The glass-based microfluidic chip has the problems of high production cost and long processing period in the preparation of the chip.In this study, a cheap glass slide was used as substrate material of microfluidic chip, By optimizing the photolithography and wet etching processes, we obtained the better wet etching conditions and prepared the glass microchannel with better structure. After irreversibly sealing with PDMS, the glass-PDMS chip The process is simple and effectively reduces the fabrication cost of the chip.The results of the electroosmosis test show that the chip has stable and good electroosmotic properties.