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SiC granule films were fabricated onto porous glass substrate by RF-magnetron sputtering. Photoluminescence (PL) mea-surements show that there are light emissions at three different wavelengths. Ultraviolet emission peaked at 360 nm origi-nated from the band-band transmission of SiC nanoparticles with relatively small size. The 370 nm light emission was due to the luminescence of the nano-skeletons of porous glass that was formed during the etching of the glass substrate. The blue emission at about 460 nm was associated with the recombination of the excited electron and O-deficient defects appeared at the interface between SiC nanoparticles and the porous glass. Furthermore,the optimal PL performance was obtained when SiC deposited time was 1h and the glass substrate was etched for 20 min in the annealing sample (450℃).
SiC granule films were fabricated onto porous glass substrate by RF-magnetron sputtering. Photoluminescence (PL) mea-surements show that there are light emissions at three different wavelengths. Ultraviolet emission peaked at 360 nm origi-nated from the band-band transmission of SiC The blue light at about 460 nm was associated with the recombination of the excited The optimal PL performance was obtained when SiC deposited time was 1h and the glass substrate was etched for 20 min in the annealing sample (450 ° C).