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该文叙连一种结构新颖的电容传感器的原理和特点及其线性度测试方法。并较详细地对所得结果作了分析,传感器的精度可达0.1％,实测线性度(包括测试线路)为0.9％左右,传感器的活动部分惯性小,具有易制造、成本低、工作可靠等优点。不仅适用于快速伺服系统中作位量反馈元件,而且能用于遥测系统中作高精度角位移测量元件,是一种很有发展前途的传感器。
The Syrian Consul even a novel structure of the capacitive sensor principle and characteristics and linearity test method. The results are analyzed in detail. The accuracy of the sensor can reach 0.1%, the measured linearity (including the test circuit) is about 0.9%, the inertial part of the sensor is small, and it has the advantages of easy manufacture, low cost and reliable operation . It is not only suitable for the position feedback component in the fast servo system but also can be used as the high precision angular displacement measurement component in the telemetry system. It is a very promising sensor.