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采用可控阴极弧的沉积方法在GCr15基体上制备了梯度和调制多层结构的氮化铬/铬(CrN/Cr)薄膜,对不同的CrN/Cr薄膜的组织结构、力学性能和耐磨性能进行了研究。通过扫描电镜、能量散射谱、X射线衍射、纳米压痕、划痕试验、微摩擦磨损测试仪及形貌测试仪对薄膜的组织结构、成份、力学性能、结合强度及耐磨性能进行了分析。结果表明:制备的薄膜厚度约5.5μm,梯度结构及调制多层CrN/Cr薄膜呈现明显的立方CrN(111)(200)取向,薄膜力学性能(包括硬度,模量,结合强度等)及耐磨性能均与不同的结构及调制周期相关。梯度结构的CrN/Cr薄膜硬度达到25 GPa,结合强度55 N,磨损率为32.754×10-6mm3/N·m,力学及耐磨性能明显优于其它多层结构,说明梯度结构可有效地改善CrN/Cr薄膜的性能。
Cr (Cr) / Cr films with gradient and modulation multi-layer structure were prepared on GCr15 substrate by controlled cathodic arc deposition. The microstructures, mechanical properties and wear resistance of different CrN / Cr films Were studied. The microstructure, composition, mechanical properties, bonding strength and wear resistance of the films were analyzed by scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, nanoindentation, scratch test, micro-friction and wear tester and morphology tester . The results show that the prepared films have a thickness of about 5.5μm, the graded CrN (111) (200) orientation and the mechanical properties (including hardness, modulus, bonding strength and so on) Grinding performance is related to different structures and modulation cycles. Gradient structure of CrN / Cr film hardness of 25 GPa, the bonding strength of 55 N, the wear rate of 32.754 × 10-6mm3 / N · m, mechanical and wear resistance was significantly better than the other multi-layer structure, indicating that the gradient structure can effectively improve CrN / Cr film properties.