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基于递归刚度矩阵方法,建立了多层结构声表面波表面有效介电常数模型,计算出了ZnO/Si结构声表面波的相速度频散特性,与实验结果符合较好,表明本文所建模型的准确性和有效性.进一步计算得到了三层结构(ZnO/Diamond/Si)声表面波的相速度和机电耦合系数的频散规律,获得此结构最优的高波速和高机电耦合系数组合及达到最优组合所需控制的变量,为高频高性能声表面波器件设计和优化提供了有益参考.
Based on the recursive stiffness matrix method, a model of surface effective dielectric constant of multi-layer structure surface acoustic wave was established, and the phase velocity dispersion characteristics of ZnO / Si structure surface acoustic wave were calculated. The results agree well with the experimental results, The accuracy and effectiveness of the three-layer structure (ZnO / Diamond / Si) surface acoustic wave were calculated and the frequency dispersion law of electromechanical coupling coefficient was obtained. The optimum combination of high wave speed and high electromechanical coupling coefficient And to achieve the optimal combination of the required control variables for high-frequency high-performance surface acoustic wave device design and optimization provide a useful reference.