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自从临界温度Tc超过液氮温度77K的高温超导材料和薄膜的研制成功,高温超导薄膜用于微电子学的研究受到了国际的关注.同时,近十年来,由于微电子器件和电路工作于液氮温度有着常温时所无可比拟的许多的优越性能,例如速度提高3～5倍等,所以低温微电子学也受到了人们的极大重视,已成为半导体电子学的一研究前沿.目前,国际上已推出了仅能在77K下正常工作的最短沟道0.07um的M0SFET,并已制成在77K下工作的商用超级计算机(ETA—10).本文结合以上研究,就超导/半导兼容技术作一评述性的报告.
Since the critical temperature Tc exceeds 77K liquid nitrogen temperature high-temperature superconducting materials and films successfully developed, high-temperature superconducting thin films for the study of microelectronics by the international attention.At the same time, the past decade, the microelectronic devices and circuits work In liquid nitrogen temperature at room temperature has unparalleled many superior properties, such as speed increased 3 to 5 times, so low temperature microelectronics has also received great attention, has become a research frontier of semiconductor electronics. At present, the M0SFET with the shortest channel of 0.07um, which can only work normally at 77K, has been put out internationally and has been made into a commercial supercomputer (ETA-10) working at 77K.In this paper, Semiconductor compatible technology as a commentary.