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对于真空蒸镀膜厚度的在线测量,最广泛使用的技术是基于当镀层增加薄膜质量时监测石英晶体谐振频率的变化。关于简单而灵敏的石英晶体监督器的多种设计问题已有不少报道。它们的准确度现在看来主要是受到谐振器谐振频率与温度相关性的限制,因为要屏蔽蒸发源对晶体放射的热可能性不大,市售石英晶
The most widely used technique for the on-line measurement of the thickness of a vacuum-evaporated film is based on monitoring the change in resonant frequency of the quartz crystal as the coating increases the quality of the film. There have been many reports on various design issues with simple and sensitive quartz crystal monitors. Their accuracy now appears to be limited primarily by the dependence of the resonant frequency of the resonator on temperature, since it is unlikely that heat from the evaporation source will be shielded from the heat of the crystal, and commercially available quartz crystals