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在物理气相沉积过程中,触发真空间隙是整个试验过程中最基本的一步,很多因素影响真空间隙的成功触发,本文对此加以讨论,并提供一个合适的触发电路.
Triggering the vacuum gap during physical vapor deposition is the most fundamental step in the overall test. Many factors influence the successful triggering of the vacuum gap. This article discusses this and provides a suitable trigger circuit.