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利用多层薄膜模型对PSTM等间距及等高扫描下的探测场进行了计算 .采用两种模式模拟了样品表面起伏引起的倾角假像及用π对称双激光束消除假像的效果 .结果表明 ,用π对称双激光束照射方法可显著减小倾角假像 .
The multi-layer thin film model was used to calculate the detection field under the same pitch and the same height of the PSTM. Two modes were used to simulate the tilt artifacts caused by the sample surface undulations and the artifact removal with π-symmetric double laser beams. , Π-symmetric double laser beam irradiation method can significantly reduce the tilt artifacts.