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利用HI 13串列加速器提供的高品质的127I束,采用弹性反冲探测技术对材料表面成分和杂质的深度分布进行了分析。用ΔE E望远镜探测器同时分析靶材料中从氢至中重的所有元素,其深度分辨为20～30nm。用Q3D磁谱仪及其焦面探测器的高分辨动量分析,得到了纳米量级的深度分辨,此方法具有对纳米厚度的多层薄膜材料进行测试的能力。
Using the high quality 127I beam provided by the HI 13 Tandem Accelerator, the depth distribution of the surface composition and impurities of the material was analyzed by the elastic recoil detection technology. The ΔE E telescope detector was used to simultaneously analyze all elements from hydrogen to medium weight in the target material with a depth resolution of 20-30 nm. Using the Q3D magnetic spectrometer and its focal plane detector for high-resolution momentum analysis, nanoscale depth discrimination is obtained. This method has the ability to test multi-layer thin-film materials with nanometer thickness.