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利用加速度计的机械变形导致电阻的变化,设计了一种测量高g值的加速度计。在Coventor Ware软件下建立了加速度计的加工工艺流程和实体模型。利用压阻分析模块MemPZR,采用FEM分析方法,通过改变压阻块在悬臂梁上的位置,得到压阻块位置与器件输出电流之间的关系,找到了压阻块在悬臂梁上的最优放置位置。改变压阻块的电导率,验证了器件的灵敏度变化与压阻率变化的趋势是一致的。在20kg加速度的输入下,得到了压阻块应力的分布,以及电流的大小及分布,和悬臂梁的应力大小及分布,验证了加速度计的抗过载能力。
Using the mechanical deformation of the accelerometer to cause the change of resistance, an accelerometer with high g-value was designed. In the Coventor Ware software to establish accelerometer processing technology and solid model. Using the piezoresistive analysis module MemPZR and the FEM analysis method, the position of the piezoresistive block and the output current of the device are obtained by changing the position of the piezoresistive block on the cantilever beam, and the optimum of the piezoresistive block on the cantilever beam is found Place. Change the conductivity of the piezoresistive block, verify that the device sensitivity and piezoresistive changes in the trend is consistent. Under the input of 20kg acceleration, the stress distribution of piezoresistive block, the size and distribution of current, the stress and the distribution of the cantilever beam were obtained, which verified the anti-overload ability of the accelerometer.