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将脱模方法与显微图像处理结合,实现了微小孔内部轮廓的尺寸形状测量.首先采用具有超弹性的乙烯基聚硅氧烷作为制模材料,通过脱模方法将微小孔内部轮廓复制为模型的外部轮廓.然后在显微镜上采集模型的放大图像,利用图像分割、边缘提取、直线检测等图像处理手段,测量出微小孔内部直径随深度的变化曲线.开发出用于测量微小孔尺寸形状的应用软件,利用该软件对脱模法的复制精度进行校验.对于孔口直径在145～155μm的微孔,所制模型在孔口处直径与原始孔口直径的平均绝对值误差为0.9μm.通过脱模方法制作三维型腔模型,得到脱模模型形貌与原始形貌的平均绝对值误差为0.37μm,均方根误差为0.51μm.所提方法融合微米量级的脱模精度和像素级的图像测量精度,可用于微小孔孔径、内部轮廓形状等的测量.
The demolding method was combined with the microscopic image processing to realize the dimension and shape measurement of the micro-hole internal contour.Firstly, the super-elastic vinyl polysiloxane was used as the molding material, Then, the magnified image of the model was collected on the microscope, and the curve of the inner diameter of the micro-hole with depth was measured by using the image processing means such as image segmentation, edge extraction, line detection, etc. A method for measuring the shape and size of the micro- Of the application software, the software used to check the mold release accuracy.For the hole diameter of 145 ~ 155μm in the hole, the diameter of the model made in the hole diameter and the average diameter of the original hole diameter of the absolute error of 0.9 μm.The three-dimensional cavity model was made by the demolding method, the average absolute error of the topography and the topography of the demolding model was 0.37μm and the root mean square error was 0.51μm.The proposed method fits the micro-scale demolding precision And pixel-level image measurement accuracy, can be used for the measurement of micro aperture, internal contour shape and so on.