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利用X射线衍射法对TiAlN涂层的残余应力主应力状态进行了实验研究,并通过二向应力状态分析法,求得了TiAlN涂层的残余应力主应力和方向角,并且其与实验测量结果偏差为4%~14%,验证了二向应力解析法在残余应力检测方面的可靠性。实验结果表明,随TiAlN涂层厚度的增大,涂层的残余应力主应力不断减小,有效地阻止了涂层与基体的剥离,具有重要的现实意义。
The residual stress principal stress state of TiAlN coating was studied by X-ray diffraction method. The residual stress principal stress and direction angle of TiAlN coating were obtained by two-dimensional stress state analysis method, and the deviation from the experimental results Is 4% ~ 14%, verify the reliability of the two-dimensional stress analysis method in the residual stress detection. The experimental results show that with the increase of the thickness of TiAlN coating, the residual stress of the coating decreases continuously and the peeling of the coating from the substrate is effectively prevented. Therefore, it is of great practical significance.