论文部分内容阅读
采用一组新的方程来分析抽气过程。这个方程基于气体分子在不均匀的金属表面上所取位置的吸附与脱附的表面,而不是扩散过程。分析脱附位置、脱附率和气体脱附的来源.认为气体脱附现象必须理解为非平衡和非稳定过程。
A new set of equations is used to analyze the pumping process. This equation is based on the adsorbed and desorbed surface of the gas molecule at the location of the non-uniform metal surface rather than the diffusion process. Analyze the location of desorption, desorption rate and the source of gas desorption It is considered that gas desorption phenomenon must be understood as non-equilibrium and non-steady process.