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评论了美国科学家C.C. Allen等于1966年发表的“测定外延层电阻率的点接触方法”之论文的局限性,从而提出了本方法。本方法从理论上解一维Poisson方程并与C.C。Allen法的公式相比较,获得某些公式。文中导出了面接触方法雪崩击穿电压V_(Ba)~∞(V)及点接触方法雪崩击穿电压V_(Bp)~∞(V)的比值为V_(Ba)~∞=0.456;同时还导出了点接触方法外延层耗尽层宽度为t_(min p)(μm)和面接触方法外延层耗尽层宽度t_(mina(μm)的比值为t_(minp)/t_(mina)=2.565。在实践上,为证实两种模型的功能,利用两种探针进行了对比测试。一种是通常被采用的点接触锇尖探针:另一种是利用φ0.8±0.1mm的银针,在银针顶上吸上φ0.4±0.1mm的汞球,以实现面接触。理论和实验吻合良好。
Comment on the limitations of the paper by American scientist C.C. Allen et al., “The Point Contact Method for Determining the Resistivity of Epitaxial Layers,” published in 1966, thus proposing this method. This method theoretically solves the one-dimensional Poisson equation and combines it with C.C. Allen formula compared to obtain some formula. The ratio of the avalanche breakdown voltage V Ba (Ba) to ∞ (V) and the avalanche breakdown voltage V Bp to ∞ (V) of the surface contact method is derived as V Ba ∞ ∞ 0.456. The ratio of the width of the depletion layer of the epitaxial layer t_ (min p) (μm) to the width of the depletion layer t_ (mina (μm) of the surface contact method is derived as follows: min - tmina = 2.565 In practice, in order to confirm the function of the two models, two kinds of probes were used for the comparative test: one is the commonly used point contact osmium probe: the other is the use of φ0.8 ± 0.1mm silver Needle, mercury needle on the top of the silver needle suction φ0.4 ± 0.1mm, in order to achieve the surface contact theory and experiments are in good agreement.