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在大量试验基础上,分析总结了模具表面态对可控硅台面造型的影响,选择出较佳的腐蚀液配比和最佳腐蚀范围,明显提高了器件电性能。
On the basis of a large number of experiments, the influence of mold surface state on the shape of thyristor table is analyzed and summarized, and a better ratio of the etchant and the optimum corrosion range are selected, which obviously improves the electrical performance of the device.