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一、序言热解氮化硼(Pyrolytic Boron Nitride,简称PBN)是特种陶瓷材料,有各向异性和各向同性之分。据文献报导,前者用途较广,而后者尚限于几方面的应用。本文研究前者。PBN材料,从资料推测在六十年代末、七十年代初期,国外从研究已进入生产阶段。开始有商品出售。如今已广泛地用于宇航、电子、电工、化工、冶金、医疗等各领域。由于它的物理和化学性能比较稳定,真空性能好,在半导体材料的制备上有
First, the preface Pyrolytic Boron Nitride (PBN) is a special ceramic material, anisotropic and isotropic. According to the literature, the former has a wide range of uses, while the latter is still limited to several aspects. This article studies the former. PBN materials, speculated from the data in the late sixties, early seventies, foreign research has entered the production stage. Start with the sale of goods. Now widely used in aerospace, electronics, electrical, chemical, metallurgy, medical and other fields. Because of its relatively stable physical and chemical properties, good vacuum performance, in the preparation of semiconductor materials have