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建立了用来研究时间空间微尺度传热现象的双波长飞秒激光抽运-探测热反射系统,与常规的单波长飞秒激光抽运探测系统相比,双波长的光路设计方案可以大幅提高信噪比,并使共线的聚焦光路更易实现,从而提高测量的准确度。建立了与实验测量过程相应的多层膜热传导模型,并实现了多参数拟合,可用于对体材料或薄膜材料的热导率以及界面热导的准确测量。本文采用这种先进的测量方法测量了SiO_2纳米薄膜的热导率及其与Si之间的界面热导。
The dual-wavelength femtosecond laser pumping-detecting thermal reflection system was established to study the microscale heat transfer in time space. Compared with the conventional single-wavelength femtosecond laser pumping detection system, the dual-wavelength optical path design scheme can be greatly improved Signal-to-noise ratio, and to make collinear focusing optical path easier to achieve, thereby improving the accuracy of measurement. The multi-layer thermal conductivity model corresponding to the experimental measurement process was established and multi-parameter fitting was achieved. It can be used to accurately measure the thermal conductivity of the bulk material or the thin film material and the thermal conductivity of the interface. In this paper, the thermal conductivity of SiO 2 nano-film and interface thermal conductivity between Si and Si were measured by this advanced measurement method.