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介绍了类金刚石碳(DLC)膜和碳化锗(Ge_xC_(1-x))簿膜的沉积方法、特性和在红外光学镀膜中的应用进展。
The deposition methods, properties and application of DLC film and Ge_xC_ (1-x) film in infrared optical coatings are introduced.