DEVELOPMENT OF A 3-DOF MICROOSITIONING WORKPIECE TABLE

• 作 者: ZhangDawei TianYanling GaoYong
• 机 构: SchoolofMechanicalEngineering,SchoolofMechanicalEngineering
• 出 处: 中国机械工程学报
• 发表日期: 2004年1期
• 关键词: 微定位工作台 精度 3-DOF 微机械 弯曲铰链 压电致动器 Micropositioning workpiece table Piezoelectric ac
• 基金项目: This project is supported by National Natural Science Foundation of China(No.50275104)

In order to achieve active grinding control,a novel numerical control micropositioning workpiece table with a resolution of 6 nm has been developed.The table is driven by three piezoelectric actuators mounted on the base.An elastic structure with three ha