The structure and magnetic properties of Fe-N thin films

来源 :中国科学：数学英文版 | 被引量 : 0次 | 上传用户：lyhl1949

【摘要】

：

200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m magnetic field. Heat treatment was effec

【作者】

：

周剑平李丹顾有松常香荣赵春生李福燊乔利杰田中卓

【机构】

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DepartmentofMaterialsPhysics

【出处】

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中国科学：数学英文版

【发表日期】

：

2002年2期

【关键词】

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Fe-N film MAGNETRON sputtering MAGNETIC properties. Fe- N film magnetron sputt

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200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was i

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The structure and magnetic properties of Fe-N thin films

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