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利用脉冲激光沉积装置在钼筒上沉积镧氧膜,通过俄歇能谱仪确定其表面成分并进行定量分析,结合扫描电镜对薄膜进行形貌观察和能谱分析。实验结果表明,本方法制备的薄膜污染小,表面不同区域成分均匀分布,发射性能测量后薄膜均一性保持良好。综合实验证明激光沉积能够制备均一性良好的镧氧薄膜。
The lanthanum oxide film was deposited on the molybdenum can by pulsed laser deposition apparatus. The surface composition was determined by Auger spectrometer and quantitative analysis was carried out. The morphology and energy spectrum of the film were analyzed by scanning electron microscopy. The experimental results show that the thin film prepared by the method has the advantages of small pollution, uniform distribution of components in different regions of the surface, and good uniformity of the film after the emission performance is measured. The comprehensive experiments show that laser deposition can prepare lanthanum oxide films with good homogeneity.