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用电子束研制不同介质膜作绝缘层的掺铒硫化锌交流电致发光薄膜器件,用X射线衍射技术测量薄膜表面结构,发现薄膜多晶的沉积有择优取向的趋势。观察不同绝缘层交流电致发光器件的初始稳定过程,讨论绝缘层质量对交流电致发光器件的影响。
The electron-beam was used to fabricate erbium-doped zinc sulfide electroluminescent thin film devices with different dielectric films as insulation layers. The surface structure of thin films was observed by X-ray diffraction. The results show that the polycrystalline thin films have the preferred orientation. The initial stability of the AC electroluminescent devices with different insulation layers was observed and the effect of the quality of the insulation layer on the AC electroluminescent devices was discussed.