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前言随着科研生产的迅速发展,精密轴系的精度越来越高,目前已达2×10~(-8)米的数量级。轴系精度的提高,相应的要求检测仪器有更高的精度。运算法电容式测微仪具有非线性小,分辨率高,非接触测量,使用调整方便等特点,因此,在精密轴系测量和微小位移测量中日益发挥重要作用。电容式测微仪的分辨率可达10~(-8)米～10~(-9)米甚至更高,对于这种高性能的仪器做出准确
Preface With the rapid development of scientific research and production, the accuracy of precision shaft system is getting higher and higher, so far it has reached an order of 2 × 10 ~ (-8) m. Shaft accuracy to improve, the corresponding requirements of testing instruments have higher accuracy. Algorithm Capacitance micrometer with small non-linearity, high resolution, non-contact measurement, easy to use adjustment and other characteristics, therefore, in the precision shaft measurement and small displacement measurement plays an increasingly important role. Capacitive micrometer resolution of up to 10 ~ (-8) meters ~ 10 ~ (-9) meters or even higher, accurate for this high-performance instruments