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本文在ＧａＡｓ／ＧａＡｌＡｓ外延材料上设计和制作了ＭＭＩ型１×４光功分器。文中首先给出器件的基本工作原理和特点，随后主要讨论器件制作中的ＧａＡｓ材料的干法刻蚀工艺，最后给出器件测试结果。
In this paper, MMI 1 × 4 optical power splitter is designed and fabricated on GaAs / GaAlAs epitaxial materials. First, the basic working principle and characteristics of the device are given. Then, the dry etching process of GaAs material in device fabrication is discussed. Finally, the device test results are given.