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检验球面镜的一般装置是 Twyman-Green干涉仪。如果被测表面是非球面时,由于测试表面与参考表面之间的形状相差较大,而得不到精确的测试结果。解决这一问题的通常方法是:1.利用某些无像差点构成一个能得到理想球面波的光路;2.专门设计一个光路使某些变形波面最后转变成理想的球面波。在光学工艺中称为“另位”检验,并被认为是最好的方法。上述的二种方法有一定的局限性、计算机产生全息图用来检验非球面是“零位”检验的一种新方式,它是基于全息图产生一个“样板波面”与被检波面相干涉而得。为准确地得到测试结果,我们分析了计算全息检验的干涉仪调整及其误差测量。
The usual device for testing spherical mirrors is the Twyman-Green interferometer. If the measured surface is an aspherical surface, accurate test results can not be obtained due to the large difference in shape between the test surface and the reference surface. The usual way to solve this problem is to: 1. Use some non-aberration points to form an ideal spherical wave optical path; 2. Specially designed an optical path so that some of the final deformation of the wave surface into the ideal spherical wave. In the optical process called “another bit” test, and is considered the best method. The above two methods have some limitations. Computer-generated holograms are used to test aspheric surface is a “zero” test a new way, it is based on the hologram to produce a “template wave” and the wave was interfered . To get accurate test results, we analyzed the interferometer adjustment and its error measurement of the computed holographic test.