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由于介质阻挡放电具有许多独特的性质,已被广泛地应用于等离子体化学、环境工程及材料表面处理等诸多领域。为了对其进行更好的研究与应用,笔者根据介质阻挡放电中的不同能量传递过程,建立了一个包括电子碰撞激发、离解、电离,吸附和解吸,复合以及中性粒子参与的反应等过程的N2-O2介质阻挡放电化学反应动力学模型,并通过求解Boltzmann方程,得到电子能量分布函数,进而通过计算获得了电子—分子碰撞的反应速率系数。代入速率方程,获得了系统中各组分粒子数浓度随时间的变化规律。结果表明:O、O3以及N2和O2分子激发态的粒子数浓度随时间先增加后减小,最后趋于一定值;O原子粒子数浓度受N2激发态分子的影响较大;O原子粒子数浓度随O2体积分数的降低而增加。
Since dielectric barrier discharge has many unique properties, it has been widely used in many fields such as plasma chemistry, environmental engineering and material surface treatment. In order to conduct a better research and application on the basis of different energy transfer processes in dielectric barrier discharge, the author has established a process that includes the reaction of electron impact excitation, dissociation, ionization, adsorption and desorption, recombination and neutral particle participation N2-O2 dielectric barrier discharge chemical reaction kinetic model, and by solving the Boltzmann equation, get the electron energy distribution function, and then get the electron-molecule collision reaction rate coefficient. Substituting into the rate equation, the variation of the particle number concentration of each component in the system with time was obtained. The results show that the concentration of O, O3 and N2 and O2 excited states increases first and then decreases with the increase of time, finally reaches a certain value. The concentration of O atoms is greatly affected by the excited N2 molecules. The atomic number of O atoms Concentration increases with decreasing O2 volume fraction.