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失效分析是半导体集成电路制造和高可靠应用过程的重要组成部分。本文着重讨论了失效分析中能够快速定位芯片内故障的成像技术。
Failure analysis is an important part of semiconductor integrated circuit manufacturing and high reliability application process. This article focuses on imaging techniques that can quickly locate in-chip faults in failure analysis.