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根据ＤｉＤｏｍｅｎｉｃｏ公式并采用计算机模拟计算了金刚石薄膜中的ｓｐ２／ｓｐ３键价比，计算中不仅考虑了ｓｐ３相及ｓｐ２相拉曼线１３３２ｃｍ－１，１５８０ｃｍ－１，同时考虑了“Ｄ”线１３５５ｃｍ－１存在，这一计算给出了金刚石薄膜质量的定量评估方法。当金刚石薄膜质量较高时，由于仪器灵敏度限制，其拉曼光谱中显示不出ｓｐ２相宽带结构情况下，无法采用拉曼光谱判定薄膜质量。在此情况下，本文提出了藉助于红外光谱计算有效电子数ｎｅｆｆ从而相对评估金刚石薄膜质量的判断技术
According to the formula of DiDomenico, the sp2 / sp3 bond ratio in diamond film was calculated by computer simulation. In the calculation, not only sp3 phase and sp2 phase Raman line 1332 cm-1 and 1580 cm-1 were considered, but also the “D” line 1355 cm- 1, this calculation gives a quantitative assessment of the diamond film quality. When the quality of diamond film is high, the film quality can not be determined by Raman spectroscopy due to the limitation of the sensitivity of the instrument and the Raman spectrum does not show the broadband structure of sp2 phase. In this case, this paper presents a judgment technique of relative evaluation of diamond film quality by calculating the number of effective electrons neff by means of infrared spectroscopy