Laser induced damage of multi-layer dielectric used in pulse compressor gratings

• 作 者: 孔伟金 赵元安 王涛 邵建达 范正修
• 机 构: Shanghai Institute of Optics and Fine Mechanics,Shanghai Institute of Optics and Fine Mechanics,Shan
• 出 处: Chinese Optics Letters
• 发表日期: 2005年03期
• 关键词: compressor dielectric evaporation incidence concave incident heating noted trans

Laser induced damage threshold (LIDT) of multi-layer dielectric used in pulse compressor gratings (PCG) was investigated. The sample was prepared by e-beam evaporation (EBE). LIDT was detected following ISO standard 11254-1.2. It was found that LIDTs of normal and 51.2°incidence (transverse electric (TE) mode) were 14.14 and 9.31 J/cm2, respectively. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was pit-concave-plat structure for normal incidence, while it was pit structure for 51.2°incidence with TE mode. The electric field distribution was calculated to illuminate the difference of LIDT between the two incident cases.

Laser induced damage threshold (LIDT) of multi-layer dielectric used in pulse compressor gratings (PCG) was investigated. The sample was prepared by e-beam evaporation (EBE). LIDT was detected following ISO standard 11254-1.2. It was found that The LIDTs of normal and 51.2 ° incidence (transverse electric (TE) mode) were 14.14 and 9.31 J / cm2, respectively. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was pit-concave-plat structure for normal incidence, while it was pit structure for 51.2 ° incidence with TE mode. The electric field distribution was calculated to illuminate the difference of LIDT between the two incident cases.