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主要内容:磁摆片是再人加速度计惯性敏感元件,是表的心脏,磁摆材料是性能特别优异的石英玻璃,结构上还镀制有金电极,由于材料特殊、结构复杂、工作环境恶劣、故制做技术涉及面广、工艺难度大、主要采用了半导体平面工艺、玻璃精加工工艺和专用特种工艺等技术。技术指标:磁摆工作刚度小于7-12g/red导通电阻小于5欧姆绝缘电阻大于100兆欧工作温度-40～+55℃
Main contents: The magnetic pendulum is inertial accelerometer accelerometer sensitive components, is the heart of the table, magnetic pendulum material is particularly excellent performance of quartz glass, the structure is also plated with gold electrodes, due to special materials, complex structure, poor working environment , So making a wide range of technology involved, the process is difficult, the main use of the semiconductor surface technology, glass finishing technology and special special technology and other technologies. Specifications: Magnetic pendulum working stiffness less than 7-12g / red On resistance of less than 5 ohms Insulation resistance greater than 100 megohms Operating temperature -40 ~ +55 ℃