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在自行研制的直流电弧等离子喷射化学气相金刚石膜设备上，初步研究了衬底温度、甲烷浓度、输入功率和循环气量等工艺参数对沉积金刚石膜的影响。总结出了制备各种级别金刚石膜的一般规律。并以11μm／h的沉积速率制备了直径60mm、厚度均匀的高质量自支撑金刚石膜，热导率可达18W／cm·K，厚度为0．7mm，其热导率已接近天然金刚石。
The effects of substrate temperature, methane concentration, input power and circulating gas volume on the deposition of diamond films were studied preliminarily on DC arc plasma jet chemical vapor diamond film equipment developed by ourselves. Summarized the general rules for preparing diamond films of various grades. A high-quality self-supporting diamond film with a diameter of 60 mm and a uniform thickness of 18 mm / h was prepared at a deposition rate of 11 μm / h. The thermal conductivity reached 18 W / cm · K and the thickness was 0.7 mm. The thermal conductivity of natural diamond was close to that of natural diamond.