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为提高激光烧蚀加工的尺寸精度，将自聚焦测量法应用于激光烧蚀加工的深度测量。研究了自聚焦传感器的测量原理并导出了被测物面深度与光电探测器成象之间的关系，据此分析了各参数对测量分辨率的影响。结论对这种传感器的设计具有重要指导意义。
In order to improve the dimensional accuracy of laser ablation, self-focusing method is applied to the depth measurement of laser ablation. The measurement principle of self-focusing sensor is researched and the relationship between the depth of object and the imaging of photodetector is deduced. The influence of each parameter on the resolution of measurement is analyzed. Conclusion The design of this sensor has important guiding significance.