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一、前言 用报低温致冷机冷却了的表面——使气体凝结在致冷片上而获得真空的泵——冷凝泵上已实用化了。大型的冷凝泵,所谓空间模拟室,在我国已设置有数百个。但是,小型冷凝泵,从泵本身研究开始发展到实用化阶段并不轻易。最近,小型的报低温致冷机的研究有所发展,技术和性能方面已有显著改善,价格方面也降低很多,冷凝泵被利用已经成为可能。冷凝泵的优点有抽速大。可获得洁净真空器真空度达超高真空水平。但是就氖、氢、氦的除去来说还存在问题。关于冷凝泵许多文献(1—12)都有分析,然而每一篇都没有讲透。至于空间模拟室,请见文献(13—19)。在这里,以利用小型致冷机的冷凝泵为重点,用一台可使用分氦气液化的简易液化型冷凝泵进行分析。
First, the foreword In order to report the surface of the cryogenic cooler cooling - to make the gas condensate in the cooling plate to obtain a vacuum pump - the condensate pump has been put into practical use. Large condensate pump, the so-called space simulation room, has been set in our country with hundreds. However, the small condensing pump, from the pump itself to the development of the practical stage is not easy. Recently, the research of small-scale low-temperature refrigerators has been developed, the technical and performance aspects have been significantly improved, the price has also been reduced a lot, and it has become possible to use the condensate pump. The advantages of condensing pump pumping speed large. Get a vacuum cleaner for ultra-high vacuum levels. However, there are still problems with the removal of neon, hydrogen and helium. On the condensate pump many literature (1-12) have analyzed, but each one did not say thoroughly. For space simulation rooms see literature (13-19). Here, focusing on the condensate pump using a mini-refrigerator, a simple liquefaction-type condensate pump that can be sub-helium-liquefied is used for analysis.