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表面微纳结构已经在微电子、半导体、太阳能电池、发光二极管、等离子基元、仿生材料、超材料、细胞生物学等领域得到了广泛的应用,极大地推动了表面科学与工程的进展。随着人们对各种表面新奇特性研究的深入,各种新型表面结构不断被提出。这些新型的结构,特别是复杂的多级次表面结构对微加工技术在成本、工艺、批量生产、精准设计和可控加工等方面提出了许多新的挑战,目前的常规微纳加工方法已经难以满足复杂结构的加工需要。近十多年来,新型微加工
Surface micro / nano structure has been widely used in microelectronics, semiconductors, solar cells, light emitting diodes, plasma cells, biomimetic materials, metamaterials, cell biology and other fields, which has greatly promoted the progress of surface science and engineering. With the deepening of the research on the novelty of various surfaces, various new surface structures have been put forward continuously. These new structures, especially complex multi-level subsurface structures, pose many new challenges to micromachining technologies in terms of cost, process, mass production, precision design and controllable processing. The current conventional micro / nano processing methods have been difficult Meet the complex structure of the processing needs. Nearly a decade, the new micro-processing