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真空喷镀工艺发展的现代水平,导致迫切需要装配用智能化仪器对工艺过程进行监测和控制的真空装置和线路.在工艺过程中必须控制以下参数:在抽空部位的不同点压力分辨的等级;用不同喷镀源物质涂敷的速
The modern level of vacuum metallization development has led to the urgent need to assemble vacuum devices and circuits that monitor and control processes using intelligent instruments.The following parameters must be controlled in the process: pressure-resolved levels at different points of the evacuation site; Spraying with different spraying source material speed