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提出一种用于检测微位移的新型电涡流传感器。该传感器中,两层微平面线圈叠加在坡莫合金铁芯上,分别作为驱动元件与敏感元件。详细给出了微平面线圈的SU-8胶UV-LIGA工艺与磁性铁芯的电铸成形工艺。当激励电流为50kHz的正弦交流信号,而且检测Ni-Fe片与铁芯间隙为10μm时,敏感线圈的输出电压达30mV,并且间隙值在50μm范围内与输出电压接近为线性关系。传感器尺寸为5mm×1.6mm,易于集成,能实现对微位移的检测。
A new type of eddy current sensor for detecting micro-displacement is proposed. The sensor, two micro-planar coil superimposed on the permalloy core, respectively, as a driving element and a sensitive element. The SU-8 adhesive UV-LIGA process and the electroforming process of the magnetic iron core are given in detail. When the excitation current is 50kHz sinusoidal AC signal, and the detection of Ni-Fe and the core gap of 10μm, the output voltage of the sensitive coil of 30mV, and the gap in the range of 50μm and output voltage close to a linear relationship. Sensor size 5mm × 1.6mm, easy to integrate, to achieve the detection of micro-displacement.