A 4 MHz Lamé mode microresonator-based oscil lator

• 作 者: 吴国强 徐德辉 熊斌 王跃林
• 机 构: State Key Laboratory of Transducer Technology,Science and Technology on Micro-system Laboratory,Shan
• 出 处: Journal of Measurement Science and Instrumentation
• 发表日期: 2013年02期
• 关键词: oscillator resonator capacitive fabrication resonant A 4 MHz Lam excited amplifi

A 4.13 MHz reference oscillator incor p orating a capacitive single-crystal-silicon(SCS) micromechanical resonator is prese nted.The microresonator is fabricated using a cavity-silicon-on-insulator(c avity-SOI) process and is excited in the Lamé mode with electrostatic driving and capacitive sensing.The Lamé mode may be described as a squ are plate that is contracting along one axis in the fabrication plane,while sim ultaneously extending along an orthogonal axis in the same plane.The microreson ator exhibits a quality factor as high as 1.4×106 and a resonant frequency of 4.13 MHz at a pressure of {0.08 mbar.} The output spectrum of the oscillator show s that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator.

A 4.13 MHz reference oscillator incorporator a capacitive single-crystal-silicon (SCS) micromechanical resonator is prese nted.The microresonator is fabricated using a cavity-silicon-on-insulator (city-SOI) process and is excited in the Lamé mode with electrostatic driving and capacitive sensing.The Lamé mode may be described as a squ a plate that is contracting along one axis in the fabrication plane, while simultaneously extending along an orthogonal axis in the same plane. The microreson ator exhibits a quality factor as high as 1.4x106 and a resonant frequency of 4.13 MHz at a pressure of {0.08 mbar. The The output spectrum of the oscillator show s that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator.