Enhanced CMOS image sensor by flexible 3D nanocone anti-reflection film

• 作 者: Li Tian Xiaolei Luo Min Yin Do
• 机 构: ShanghaiAdvancedResearchInstitute,SchoolofEnvironmentalandChemicalEngineering
• 出 处: 科学通报：英文版
• 发表日期: 2017年2期
• 关键词: CMOS图像传感器 抗反射膜 纳米 3D 互补金属氧化物半导体 镀膜玻璃 数码单反相机 网络摄像头 CMOS image sensor Nancone anti
• 基金项目: This work was financially supported by the National Natural Science Foundation of China （61474128, 21503261, 61504155 and 61404145）, Youth Innovation Fund for Interdisciplinary Research of SARI （Y5264

Complementary metal oxide semiconductor(CMOS) image sensors(CIS) are being widely used in digital video cameras, web cameras, digital single lens reflex camera(DSLR), smart phones and so on, owing to their high level of integration, random accessibility,