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首先介绍了位置敏感检测器件PSD(PositionSensitiveDetector)的工作原理和标定方法 ,再用PSD对超精密机床工作台运行误差进行在线测量 ,最后给出了误差实时补偿的方法
Firstly, the working principle and calibration method of Position Sensitive Detector PSD (Position Sensitive Detector) are introduced. Then, the error of on-line measurement of the working table of ultra-precision machine tool is measured by PSD. Finally, a real-time error compensation method is given