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许多光谱滤光片需要采用组合膜系,各膜层厚度彼此间没有明显关系。要制成多层膜,要求各膜层厚度接近理论值。目前在λ/4的组合膜系生产中,使用以单一波长为基础的光学方法,不能精确控制厚度为非整数的多层膜系的蒸镀。如果光学控制系统利用宽的光谱带宽,厚度误差就可以减小。这种改进后的厚度控制方法需测定精确的透射比,但这用现有的仪器即可达到。这个结果是由用计算机模拟特殊的多层膜的结构来获得的,而且,对其它非λ/4多层滤光片同样是正确的。
Many spectral filters need to use a combination of film lines, the film thickness is not obvious relationship between each other. To make a multi-layer film, requiring the film thickness close to the theoretical value. At present, in a λ / 4 combination film system, the optical method based on a single wavelength can not precisely control the deposition of a multilayer film having a non-integer thickness. If the optical control system utilizes a wide spectral bandwidth, the thickness error can be reduced. This improved thickness control method requires the determination of the exact transmittance, but this can be achieved with existing instrumentation. This result was obtained by simulating the structure of a special multi-layer film using a computer and was also correct for other non-λ / 4 multi-layer filters.