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本文针对微机械领域中常用的静电梳微谐振子中存在的静力学问题 ,对其悬臂梁的两种结构——蟹脚型结构和直脚型结构的受力情况作了分析 ,推导出应力和位移的计算方法 ,并对蟹脚型结构的设计进行了优化 ,和国外文献进行了相比 ,它们更符合实际情况
In this paper, the static problems of the electrostatic comb micronic resonators, which are commonly used in the field of micromachining, are analyzed. The two structures of the cantilever beam, the structure of the crab foot and the structure of the straight leg, are analyzed. The stress And displacement calculation method, and the design of the crab-foot structure has been optimized, compared with the foreign literature, they are more in line with the actual situation