A New Method for Research of Grown-In Microdefects in Dislocation-Free Silicon Single Crystals

来源 :结晶过程及技术期刊(英文) | 被引量 : 0次 | 上传用户：secretcode

【摘要】

：

As a virtual experimental device for analysis and calculation of grown-in microdefects formation in undoped silicon dislocation-free single crystals the softwar

【作者】

：

V.I Talanin I.E Talanin N.Ph U

【机构】

：

不详

【出处】

：

结晶过程及技术期刊(英文)

【发表日期】

：

2011年2期

【关键词】

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SILICON Grown-In MICRODEFECTS PRECIPITATE VACANCY Microvoid INTERSTITIAL Disloca

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As a virtual experimental device for analysis and calculation of grown-in microdefects formation in undoped silicon dislocation-free single crystals the software is proposed. The software is built on the basis on diffusion model of formation, growth and c

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A New Method for Research of Grown-In Microdefects in Dislocation-Free Silicon Single Crystals

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