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考察了C(硬)/C(软)调制比对多层膜结构和性能的影响。采用磁过滤直流阴极真空弧源沉积技术制备了C/C多层膜,通过Raman光谱对多层膜的结构进行了表征;用硬度计和销盘式摩擦磨损试验机测试了多层膜的硬度及摩擦学性能。结果表明:所制备的多层膜呈现类金刚石结构并具有良好的耐磨性,其摩擦系数均小于0.15;随多层膜中软膜比例的增大,薄膜中sp2簇的数量逐渐增多,薄膜显维硬度呈现下降趋势,多层膜的耐磨性能下降。
The effects of C (hard) / C (soft) modulation ratio on the structure and performance of multilayer films were investigated. The C / C multilayers were prepared by vacuum filtration DC magnetic arc source deposition technology. The structure of multilayers was characterized by Raman spectroscopy. The hardness of the multilayers was tested by hardness tester and pin-plate type friction and wear tester And tribological properties. The results show that the prepared multilayer films have the diamond-like structure with good wear resistance and the friction coefficient is less than 0.15. With the increase of the proportion of soft films in the multilayer films, the number of sp2 clusters gradually increases, Dimensional hardness showed a downward trend, multilayer wear resistance decreased.